Gasonics L3500

Brand: GaSonics
Model: L3500

Used
Details:
The GaSonics/IPC L3500
asher is a versatile system
designed for clean, damage
free removal of the most difficult
resist structures
Using the production proven
L3300 platform
the L3500 improves throughput
and has a wide process window
die to its patented large diameter
microwave plasma source
3-8" capabilities
Platen and lamp heating capability
Programmable process controls
including power
Reliable endpoint detection
OEM Grade Microwave Power Generator
Small footprint, low cost of ownership
Graphics user interface