Gasonics L3510

Ref : 2534768-9-W

Condition : Used

Manufacturer : Gasonics

Model : L3510

Year(s) : -

Quantity : 1

Location : Seller or machines location:
ASIA (North East)

Last check : 28 Nov. 2023

- 8" Configured (can change to 6")
- Quartz plasma tube and baffles
- ASTEX Microwave 1.2kw
- Temperature Controlled
- Wafer Cooled
- Aluminium Process Chamber
- Robotic Pick and Place Wafer Handler
- Fixed Positin Single Cassette Station
- Post Process Cooing Station
- Downstream End Point Detection

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