Gasonics L3510E

Brand: GaSonics
Model: L3510E
Isotropic Etch System

Used
Details:
is a high etch rate
downstream isotropic etching system
designed to provide isotropic profiles along
with the ability to etch or ash at low temperatures
Utilizing the proven L-Series 3510 platform
the etch system also uses the downstream microwave sources and applicator
With excellent process controls
the 3510E provides a wide range of process capabilities
and applications
The system also includes a topside lamp
option for heating the substrates in a
“pins up” mode
The “pins up” mode allows backside etching of various materials