Gasonics PEP Iridia

Brand: GaSonics







The GaSonics PEP Iridia
is a dual chamber etcher used to independently deskin
(remove a crusted layer of photoresist
without penetrating a lower layer of
conventional photoresist) or to
independently remove photoresist
Features:
Can be used in a two step process
deskin a wafer and in a second step
perform a conventional as removal.
Operates while simultaneously producing
microwave energy and rf energy.
Dual cool down stations
Water vapour delivery system
Mkiron closed loop temperature controls.
SECS/GEM Interface
Multiple step process capability.
Specifications:
Handles wafers up to 200mm.
6 channel gas box can be configured
to customer requirements.
NF3 capable.
Fluorine capability