Glen R3A 500W

Downstream, Electron-Free Plasma for cleaning sensitive electronic components
The Glen R3A Plasma Cleaner can be operated in a single or dual plasma sequence
Advanced Energy PE-1000 AC Plasma Power Source; 500w@ 40khz
Electrodes: (2) 14 x 14-inch electrode sets; capable of up to 8 sample trays
3 Plasma Modes:
ACTIVE PLASMA for routine cleaning of sample surfaces
RIE PLASMA for aggressive cleaning of non-ESD sensitive samples
DOWNSTREAM ELECTRON-FREE PLASMA for cleaning sensitive electronic components
Gas Inputs: dual gas inputs with needle valves, PLC-controlled
Computer Interface: RS 232 interface
Power Requirements: 110Volt
Full Load Current Rating: 13 Amp