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Hitachi M-8190XT
Ref :
2608446-9-CP
Condition :
Used
Manufacturer :
Hitachi
Model :
M-8190XT
Year(s) :
2013
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check :
17 Apr. 2024
3 Chambers
In Fab, Warm Idle
Software version: 2.0405
CIM: E84, SECS-GEM. GEM300, Interface A
Hardware Configuration (fab):
Main system: Hitachi HTA M-8190XT (3E) Etch System - 1
SMIF system: Load Ports - 3
Handler system: Standard Automation Equipment & Software - 1
Options: Equipment Specification based upon #KF0-6359
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