Hitachi S-5200 FE SEM

Grid electron microscope
Resolution: 1,8 nm at 1kV or 0,5 nm at 30kV

Magnification:
Low magnification mode: 60 to 10k x (accuracy ± 10%)
High magnification mode: 800 to 2,000k x (accuracy ± 10%)

Electron source: Cold-cathode field emission type electron source
STEM option: brightfield /darkfield STEM Detector, STEM sample holder

EDX X-MAX 80 (2012)
AZtec EDX Software Advanced

Point electronic DISS5 (2012)
Hitachi ZONE-TEM Desktop Sample Cleaner (2014)
Many additional parts and specimen holders (see pics.)