Karl Suss MA 150M

Wafer Size Range
Minimum 50 mm
Maximum 150 mm
Set Size 150 mm
Alignment Optics Splitfield Video
Software Revision Level 6.0
Air Consumption 0.88 CFM (0.02 cu m/min)
Accessories
Dual Video Microscope: Model DVM6
Objectives:
Olympus UMPlanFI 5x/0.15
Olympus UMPlanFI 10x/0.03
Olympus LMPlanFI 20x/0.40
Other Information

Alignment/Exposure Modes: Hard, Soft, Vacuum and Proximity
Power Requirements 220 V 10.0 A 60 Hz 1 Phase
Exterior Dimensions
Width 48.000 in (121.9 cm)
Depth 56.000 in (142.2 cm)
Height 63.000 in (160.0 cm)
Weight 1,194 lb (542 kg)