KDF 903

• Pallet Size: Approximately 12 x 12 in
• Pallet Coating: Entire pallet coated
• Part Holding Fixtures: Not required
• Control System: New programmable HMI/PLC system
• Operating Modes: Operator mode
• Operating Modes: Process engineer mode
• RF Etch Power Supply: New
• Matching Network: New
• Cryopump Model: CTI 8 rebuilt cryopump
• Compressor: Included
• Cryopump Lines: Included
• Mechanical Pump: Rebuilt dual-stage mechanical pump
• Mechanical Pump Warranty: 1 year
• Electronics: New
• Electronics Warranty: 1 year
• Loading Function: Automatic part loading
• Unloading Function: Automatic part unloading
• Sputter Power Control: Programmable on touch screen
• Sputter Time Control: Programmable on touch screen
• Etch Power Control: Programmable on touch screen
• Etch Time Control: Programmable on touch screen
• Vacuum Control: MFC-controlled vacuum level