KLA Altair 8920i AOI Tool

KLA Altair 8920i Wafer Frontside Automatic Optical Inspection Tool
Combines Brightfield & Darkfield Defect Detection with
Flexible LED Illumination
Fastest Available Excursion Monitoring Capability for >0.2 um Defects
Phoenix 3.0 EFEM with 3ea Loadports for 6” & 8” Wafers
High Performance Inspection Objectives: 2X, 3.5X, 5X, 10X
High Performance Review Objective: 35X
Low Warpage Chuck for 6” & 8” Wafers
Multi-Region Based Thresholding
Advanced Detection Algorithms
Automated Review Sampling
Brightfield Review Mode
Litho Bevel Centricity
Autofocus Capability
Rules Based Binning