KLA Puma 9550 i Defect Inspection

KLA Puma 9550 i Defect Inspection, 12"
- 3 Phase
- 5 Wire
- 208 V
- 16 amps
- 50/60 Hz
- 300mm Dual Films Handler w/Integrated Mini Environment DP sensor
- Two Front Interface Mechanical Standard (DFIMS) Load ports Integrated Sub Class
0.1 Mini Environment, Front to Back Configuration
- Modular Inspection Station
- Modular User Interface
- High Res Auto Image grab w/DSA Option
- Advanced Low Noise Detection Algorithms
- Region Based Binning
- Integrated High Magnification Review Optics & Camera with
Auto focus - 5 selectable objectives w/Brightfield / Darkfield viewing
- Defect Clustering & Review Sampling
- Low Contact Chuck
- Integrated ULPA Filter
- Data Transfer including Floppy Disk, CD-R and Ethernet
- Wafer Pre-Aligner
- High Resolution Color Display
- KLARF
- Blanket Film Inspection
- Automated Inspection
- Advanced Oblique Illumination Optics
- Region Based Multi-Thresholding
- IRIS spatial filtering technology
- High resolution collection Optics w/improved polarization purity analyzers
- New High Quantum Efficiency imaging sensor technology improving overall defect S/N
in low light regions of the device
- New Advanced flexible Image Computer enabling 2.0X increase in data processing rate
- Higher Numerical Aperture (NA) Optics across the entire inspection operating range
providing the highest sensitivity while enabling higher throughput modes for
optimized CoO
- Five-Line-Scan operating modes & new Optical Imaging Line for
increased optical mode flexibility
- Normal Illumination Optics which offers the highest sensitivity for unique
(non-oblique) DOI capture
- Advanced RFID Reader
- GEM/SECS Interface
- CE Compliance