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KLA Surfscan 6220
Ref :
2721977-9-CP
Condition :
Used
Manufacturer :
KLA
Model :
Surfscan 6220
Year(s) :
1992
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
KLA SURFSCAN 6220 - Defect inspection system
Vintage: 1992+/-5j
Wafersize: 200mm
Dimensions & weight estimates:
Mainframe dim (cm): 76 x 105 x 167
Mainframe weight (kg): 1000
Tool was operational at shutdown.
Wafer size: 6 and 8 inch.
One carrier setup for 6 inch, one carrier for 8 inch
SECS/GEM: Yes
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