KLA-Tencor AIT XP Darkfield

Brand: KLA-Tencor
Model: AIT XP Darkfield
Inspection System

Used
Details:
The KLA-Tencor AIT XP+ Patterned Wafer Inspection system is designed to meet the needs of 0.13um and beyond design rule processes. Based on the highly popular AIT series, the AIT XP+ incorporates Mixed Mode Detectors with Adaptive Mode for increased defect detection and sensitivity. Able to process both 200mm (8”) and 300mm (12”) wafers, the AIT XP+ allows for accelerated 300mm yield learning and faster production ramp. Significant Cost of Ownership (CoO) improvements are realized with the sensitivity enhancements achieved
with Adaptive Mode that allow for spot size migration

Features:
AIT XP+ dual 300mm SMIF configuration.
Darkfield defect inspection system
Fast recipe setup
Adjusts dynamically to all die regions to deliver maximum sensitivity and improved detection of killer defects in a single scan regardless of the pattern density.
Automated patterned defect inspection
Standard KLA AIT Operator Interface Monitor with keyboard, trackball and joystick FD, CD Drives

Specifications:
Multi-spot optics:
3.5um, 5um, and 7um
3.5um, 5um, and 10um
5um, 7um, and 10um