KLA-Tencor P10 Surface Profiler

The KLA Tencor P10 is a manual-load stylus profiler primarily used
for measuring surface characteristics like step height, roughness,
and waviness in research and development or production environments.

Key Specifications
Vertical Range 50 Å to 130 μm (standard)
Vertical Resolution Sub-angstrom resolution (as low as 0.5 Å)
Scan Length Up to 60 mm (full scan)
Stylus Force Range Programmable from 1 mg to 50 mg
(With optional Microhead 0.05 mg to 50 mg)
Max Substrate Size Up to 8 inches (200 mm) diameter
Stage Motorized X-Y stage with manual Z control
Analysis Parameters Step height, roughness, waviness, slope, area, etc.
Operating System Windows 3.1

Features
Closed-loop sensor design: Ensures constant force application during scanning,
allowing for measurement on a variety of surfaces, including some softer materials like photoresist.
Data Analysis: Features include fitting and leveling scan data, automated edge or
apex detection for features, and 3D rendering of scan data.
Optics: Equipped with top-view and side-view optics for sample alignment and imaging.
Includes VLSI 938nm (9380A) Step height standard and Stylus Alignment Tool
Includes User and Maintenance manuals

KLA-Tencor P10 can profile a variety of materials including:
- Semiconductor wafers
- Thin-film heads
- Precision-machined and polished surfaces
- Ceramics for micro-electronics
- Glass for flat panel displays
- Optical surfaces