KLA-Tencor Prometrix RS75

KLA-TENCOR PROMETRIX RS75 FOUR POINT PROBE SYSTEM consisting of:
- Model: RS-75
- Four Point Probe System
- Up to 200 mm wafers
- One second per site overall measurement speed
- A 49-site contour map with temperature compensation can be achieved on
a manually loaded test wafer in less than sixty seconds.
- Provides precise sheet resistance measurements for monitor wafers,
with significantly improved speed over existing systems.
- Ideal for a wide range of semiconductor process monitoring applications such as
ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP and bulk silicon.
- Displays include contour maps, 3-D plots, and diameter scans
- Refurbished to Excellent Condition.
- Operator Manual for Prometrix RS75 System.


Condition:
Excellent Condition Guaranteed.
3 Month Warranty.
30 Day Right of Return.