KLA-Tencor SP1 TBI Unpatterned Surface Inspection System

KLA-TENCOR SP1 TBI UNPATTERNED SURFACE INSPECTION SYSTEM consisting of:
- Brooks Single 200/300mm FOUP
- Inquire about Handler Options for Various Size Wafers
- Unpatterned Surface Inspection System
- Wafer Measurement Module
- Triple Beam Illumination (TBI)
- Normal Illumination- 0.079 Defect Sensitivity
- Oblique Illumination- 0.060 Defect Sensitivity
- Includes DB Enhancement Option
- Includes GEM/SECS (Comm Port) Option
- Includes GEM/SECS (HSMS) Option
- Includes XY Coordinates Option
- Blower Box
- 2009 Vintage


KLA-TENCOR SURFSCAN SP1 REFURBISHMENT PROCESS consists of:
- Replace used Laser with New Laser
- Replace used Photomultiplier Tubes (PMTs) with Brand New PMTs, as required
- Replace used Power Supply, as required
- Replacement or repair of any bad circuit board.
- Mechanical assemblies cleaned, lubricated, rebuilt, or replaced as needed.
- Optics assemblies cleaned and aligned to meet performance specifications or
replaced as needed
- Electronic assemblies tested to meet performance specifications or
replaced as needed
- Puck assembly rebuilt or replaced (if applicable)
- Replace old monitor with Brand New LCD Monitor
- Calibrate system using calibration wafers
- Machine covers are cleaned, polished, or replaced, as needed
- Performance specifications returned to original factory specifications
- Machine is fully tested to verify compliance to OEM specifications
- System transport locks installed; system prepared for shipment