KLA-Tencor Surfscan SP2

Wafer Particle Measurement System
Version: 300 mm
Vintage: 01.12.2010

Windows System Windows XP SP3
Main S/W NGS 5.4 SR3 HF3
Wafer Size 300mm SEMI Notch

Carrier
3 AdvanTag SW CID, Phx, Shinko (load port)
8 user-configurable LEDs to display the loadport status
Load/unload button for manual delivery hand-off
Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS host.

Facilities
Power: 208 VAC, 3W-N
CDA: > 28.3 Nl/min, > 6.6791 kg/cm2
Vac: > 28.317 l/min, > -700 mm Hg

Chamber
Powder Coat Panels Kit
200/300mm Vacuum option
Optical Filter

Load port Vacuum 300mm Dual FIMS

Application
2mm Edge Exclusion
Oblique Incidence Illumination (High / Standard / Low)
Normal Incidence Illumination (High / Standard / Low)
Enhanced XY Coordinates
IDM SP2
Standard Classification package
LPD-N Classification
LPD-ES classification
Grading and Sorting
Spatial Filter (20 degree)
Spatial Filter (40 degree)
Spatial filter (rough films)
Spatial filter (Back)
High Sensitivity Inspect Mode
High Throughput Inspect Mode

Options
Haze
Haze Normalization
Haze Analysis
IC/OEM Mfg Surf Quality Recipe
Wafer size. 300mm XY Calibration Wafer with first Article

HARDWARE CONFIGURATION
Others 5 Color Light Tower (RBYGW)

Ethernet
NFS Client
E84 enabled for OHT & AGV/RGV
E87 (Based on E39)
GEM/SECS and HSMS
E40/ E94/ E90 / E116
Handler Secondary UI, Phoenix, SP2

Main Computer
Intel®Xeon™ CPU 3.20GHz
3.5 GB RAM Memory
DVD- ROM
Mouse
Keyboard
3.5" Floppy
NGS application software

FEC computer
Intel®Pentium®4 CPU
512 MB RAM Memory

Damaged/Missing parts list
Damaged- chuck,AC pin, wafer shutter assy., x axis stage leadscrew,x axis motor,center device,y axis assy.