KLA-Tencor UV-1280SE Thin Film Measurement System

KLA-TENCOR UV-1280SE THIN FILM MEASUREMENT SYSTEM consisting of:
- Model: Prometrix UV-1280SE
- Configured for 150mm handling
- Measures Film Thickness, Refractive Index (RI) and Extinction Coefficient
of Single and Multi-Layer Thin Film Stacks Simultaneously without
Referencing
- Reflectivity Range of 220 nm to 800 nm
- Intel Pentium Computer
- Operations Manuals Included
- Fully Refurbished to Excellent Condition

MEASUREMENT CAPABILITIES:
Single Layer Thickness (t):
- Thermal Oxide: 0 Å to 40 µm
- Oxynitride: 0 Å to 30 µm
- Nitride: 0 Å to 25 µm
- BPSG: 0 Å to 40 µm
- Photoresist: 0 Å to 40 µm
- Polyimide: 0 Å to 40 µm
- Poly on Oxide: 50 Å to 2 µm Poly on 40 Å to 4000 Å Oxide
- Poly on Nitride: 50 Å to 2 µm Poly on 40 Å to 4000 Å Nitride
- Amorphous Silicon: 50 Å to 2 µm Amorphous on 40 Å to 4000 Å Oxide or Nitride
- Oxide on Poly: 50 Å to 1 µm Oxide on