LAM 2300 Exelan Flex

Ref : 255099

Condition : Used

Manufacturer : LAM

Model : 2300 Exelan Flex

Year(s) : 2006

Quantity : 1

Location : Seller or machines location:
United States (USA)

Last check : 26 Feb. 2025

Wafer Size 300 mm
Fab Section Etch

General Product Information
Vendor Supplier LAM
Model 2300 Exelan Flex
Vintage 2006
Process Oxide ETCH

Hardware Confguration (Fab)
Handler System ATM & VTM robot 1
Main System Main Tool 1
Factory Interface FOUP 3

Hardware Confguration (Subfab / Auxilliary Units)
RF RACK 1
AC RACK 1

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