Lam Research 2300

Dry etch cluster tool Mainframe without chambers
Version: 200 MM
Vintage: 01.06.2008
The equipment has been professionally de-installed,
and is currently located in a storage warehouse.
Equipment condition: Good.
Configuration notes: LAM 2300

Mainframe including:
›1 x AC Rack ›1 x EFEM - Atmospheric transfer module
›1 x Vacuum transfer module ›3 x Loadports (Ergo 200mm)
-Fitted with qty 3 200 mm SMIF loadports
-Brooks Magnetran hub Robot, replaced in Feb 2016