Lam Research TCP 9400se

Ref : 2747455-9

Condition : Used

Manufacturer : Lam Research

Model : TCP 9400se

Year(s) : -

Quantity : 1

Location : Seller or machines location:
United States (USA)

• Wafer Size: 150 mm
• ESC: Fixed Gap
• Vat: 200 mm
• Turbo Pump: Edwards 1303
• Gas Box: 8 Gas Orbital
• Generators: RFG 1250 Halo and RFDS

Available Options:

• Wafer Size Range: 100 mm – 200 mm
• Upgrade: PTX / VCI
• Services: Installation and Startup

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