Lam Research TCP 9600 SE Etcher

Condition: fully refurbished to OEM Specs.
Model : TCP9600SE with DSQ & APM
Operator Interface : bulkhead
Software : Envision
Transportation Wafer Size : 200mm Wafers ( 8” )
Indexer : Hine 38A
Load station: Belt type Shuttle, Standard Edge Detector & Load lifter

C/B Hardware Configuration
Middle Chamber: 6cm Fixed Gap(715-331131-002)
Plate Top Ceramic : 716-330122-003
Wafer Clamping : ESC (Notch)

RF Generator
1) TCP : RFG1250
2) Bias : RFG1250
3) DSQ : RFG1250

Chamber Manometer : Main Manometer ,3Torr Manometer & Reference Manometer
TCP Matcher : 853-032190-008,
Bias Matcher : 853-330951-021
Turbo Pump : Alcatel ATH-1300M

Pressure Controller
Main : Vat Valve(64PM) & PM5
DSQ : MDVX-018 & AC-2

Hinged DSQ
DSQ Matcher
Heated Paddle
WVDS : Manual fill
Chamber heater Controller: 12 Loop External Anafaze
Orbitally welded Gas Box: Total 8 Gases
Closed Loop He Cooling: UPC8130 & Tylan CDL-12S13(20 Torr)
Remote Power Module: Main 175A Remote Power Module

Fully refurbished to OEM specs