Matrix 105 Asher System

Brand: Matrix
Model:105 low temperature asher
Single wafer

Used
Details:
Single cassette
Microprocessor controlled menu-driven
Multi-step program
(three steps + over etch) process program
Wafer lift pin assembly (up and down)
Temperature, gas flow
and substrate position
Low temp processing
eliminates thermal damage
Independent control of pressure
Self contained RF power supply
Butterfly valve for
more precise pressure control
Phase magnitude detector
to provide real-time RF impedance
matching control
Two mass flow controllers
Specifications:
Setup for 3 - 6" wafers
Brooks cassette
handling system up to 150mm wafers
Range for strip: 150C to 250C +/- 5C
Range for descum: 70C to 150C +/- 5C