Nikon MS-550 Large Panel Inspection Microscope

Large panel inspection tool
transmitted and reflected light observation
manual stage with XY travel 56cm (22") X x 48.5cm (19") Y
maximum 23"x23" substrate
Windows PC
Media Cybernetics Image Pro Plus acquisition and
measurement software with USB dongle
17" LCD monitor
Hitachi KP-D208U color camera
250w fiber optic illuminator
Nikon long working distance brightfield and
darkfield CFI LU Plan BD 5x, 10x, 20x, 50x, 100x objectives
L-NU5A motorized nosepiece
L-NCNT controller
trinocular viewing head with 10x/22 eyepieces