Nikon Optiphot-150S Wafer Inspection Microscope

Nikon Optiphot-150S upright brightfield wafer inspection microscope with coaxial
EPI illumination, supplied with a Nikon NWL-641M automatic wafer loader.
- CF Plan infinity-corrected brightfield objectives:
5X/0.13, 10X/0.30, 20X/0.46 EPI and 50X/0.80 EPI
- Ergo trinocular head with CFWN 10X/20 WF eyepieces
- Jai CV-730 Y/C CCD microscope camera
- 12 V / 50 W lamphouse with integrated power supply
- Nikon NWL-641M wafer loader & wafer-transfer
X-Y-theta stage (150 mm / 6 in wafers)
- Coaxial X-Y rotary stage
- Macro inspection capability