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Novellus C3 Vector Express AHM PECVD
Ref :
2725160-9-CP
Condition :
Used
Manufacturer :
Novellus
Model :
C3 Vector Express AHM PECVD
Year(s) :
2007
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Wafer 300mm
No HDD
In storage
1 Chamber
Advanced Ashable Hard Mask process ( AHM )
"Designed to address the challenges in advanced technology nodes that
utilize 193nm lithography for high aspect patterning etch,
where thinning photo-resist material makes it difficult to
extend conventional patterning, AHM on VECTOR Express represents a
major technical breakthrough compared to conventional amorphous
carbon film processing"
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