Novellus C3 Vector Express AHM PECVD

Wafer 300mm
No HDD
In storage
1 Chamber
Advanced Ashable Hard Mask process ( AHM )

"Designed to address the challenges in advanced technology nodes that
utilize 193nm lithography for high aspect patterning etch,
where thinning photo-resist material makes it difficult to
extend conventional patterning, AHM on VECTOR Express represents a
major technical breakthrough compared to conventional amorphous
carbon film processing"