Omni SE-6003

• X-Y Stage Coarse Movement (X): 200 mm
• X-Y Stage Coarse Movement (Y): 200 mm
• X-Y Stage Fine Movement (X): 13 mm
• X-Y Stage Fine Movement (Y): 13 mm
• Sample Stage Rotation Coarse Movement: 180°
• Sample Stage Rotation Fine Movement: 10°
• Probe Carrier Stroke (Up, Separate): approx. 500 μm
• Probe Carrier Stroke (Contact–Separate): approx. 1 mm
• Probe Carrier Z Movement: 20 mm
• External Dimensions: W 470 × D 550 × H 630 mm
• Mass: approx. 55 kg
• Microscope: Olympus SZ4045CHI
• Microscope Magnification: 0.67× – 4×
• Coaxial Illumination Eyepiece: 30×
• Objective Lens: 110AL 0.75×
• Working Distance: 130
• Coaxial Lighting Configuration: 1/4 Wavelength Version (SZ-CHI)
• Vacuum Pump: ULVAC DA-15D