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Perkin Elmer 4400 Sputter

Ref : 1841385-9
Condition : Used
Manufacturer : Perkin Elmer
Model : 4400 Sputter
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 07 Feb. 2022

Wafer Size: Small~6 inch
Wafer loading: Manual, with Load Lock
Cathodes: Circle Shape, 8″ & 4 max
Sputter Methods: DC/RF; Diode/Magnetron
Sputter Methods: DC/RF; Diode/Magnetron
Gas Lines: 1~3 MFCs

System Controller
Maintenance, Manual, Semi Automatic and Full Automatic operation modes
Automated calibration of all sub-systems
Troubleshoot to sub-assembly levels
Programmed comprehensive calibration and diagnostic functions
Recipe creation for full automatic wafer processing
Automatic decline of improper recipes and process data
Multi-level password protection
Storage of multiple recipes and system functions
Real-Time process data acquisition, display, analysis
Real-Time graphics use display
Process Data and Recipe storage on a hard drive
Easy TC vacuum gauge calibration
Positioning Deposition(optional)
GEM/SEC II functions (optional)

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