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Oxford 100 Plus

Ref : 2000092-9-W
Condition : Used
Manufacturer : Oxford
Model : 100 Plus
Year(s) : -
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 23 Dec. 2021

Serial Number: 219673
Wafer Size: 200mm

RIE system
Manual Load lock system
Alcatel 600T Turbo pump and controller 13.56MHz RF power supply
PLC controller
Remote Gas box 208V 25.6A 50/60Hz

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