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Oxford ionfab 300plus

Ref : 2416094-9-AW
Condition : Used
Manufacturer : Oxford
Model : ionfab 300plus
Year(s) : 1994
Quantity : 1
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

1994 Oxford Ionfab 300 Plus Ion Beam

etching/deposition system

SERIAL NUMBER 219574

THE TOOL HAD 4 MFCs, only used ARGON to mill metal layers on SILICON wafers

HAS 3cm gun,we did'nt sputter

It holds 4, 4" targets,

HAS 15cm Gun for etching

200 mm tooling

The motor controllers were upgraded

Comes With manual

only used t he ION milling portion of the tool



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