Oxford Plasmalab 80 Plus RIE System

OXFORD PLASMALAB 80 PLUS RIE ETCHER consisting of:
- Model: Plasmalab 80 Plus RIE
- Single Chamber RIE, non-load locked
- Ideal for R&D reactive ion etch application
- Process: Dielectric etch and Descum
- System setup with universal platen
(with ability to place various size(s) of substrates).
- Up to 200mm wafer capable
- System PC, Keyboard, Mouse
- 300W RF Generator 13.56MHz
- Turbo Pump
- Rotary Vane Rough Pump, Fomblin Prep
- Chiller - 415Vac, 3ph, 32A
- Operations Manual and Documentation
- Fully Refurbished to excellent condition (see below details)

Gas Box Currently Configured for: Ar, CF4, O2, CHF3, SF6 & He
- System components carefully packed, labeled, and professionally crated.

OXFORD REFURBISHMENT PROCESS consists of:
- Chamber disassembled for refurbishment.
- Chamber received full wet clean.
- Chamber o-rings and seals are replaced with brand new.
- Electrostatic Chuck (ESC) sent out for refurbishment (if applicable)
- All MFCs rebuilt and calibrated professionally.
- All corrosive gas lines replaced with brand new.
- All Non-corrosive gas lines purged.
- Vacuum pumps professionally rebuilt.
- Turbo pump professionally rebuilt.
- Chillers serviced and fully tested.
- All wiring/wire harnesses are checked, repaired or replaced if needed.
- All liquid and air lines, tubing and fittings checked and
replaced if necessary.
- Major components disassembled for checkout, servicing,
cleaning, and lubricating. Parts are repaired or replaced as needed.
- Checkout of all electronic and mechanical parts.
- Machine covers are cleaned, polished or replaced as needed.
- Post-refurbishment system leak and RF calibration checks,
with documentation provided to customer.
- System cycle and repeatability testing completed prior to
cover replacement and wipe down.
- System components carefully packed, labeled, and professionally crated.

Condition:
Excellent Condition Guaranteed.
Fully Refurbished to Factory Specifications by ClassOne.
6 Month Warranty and Full Specifications Guarantee.
30 Day Right of Return.