Plasma 730 SLR PECVD

Brand: Plasma
Model: 730 SLR PECVD
Load-Locked System

Used
Details:
with platen transfer
Windows operating system
Top electrode is RF powered
and the substrate is temperature controlled.
Inlcudes vacuum pump with roots blower
Model 700 Al Chamber with for PECVD deposition
2-8" platen
13inch top electrode
Watlow 250 degrees C heater
Specifications:
Temperature range: 80 deg. C to 400 deg. C
(8) MKS model 1179 MFCs
N2O, N2, He, SF6, Silane 2% in He, Silane 1.9% in He
208V, 3 Phase, 60 amp