Plasma Etch BT-1/C

Plasma Etcher / Plasma Cleaner
Includes vacuum pump

The BT-1 is a complete industrial grade
plasma treatment solution capable of
plasma cleaning, plasma etching, reactive ion etching (RIE),
and more. Its large processing shelves and
spacious chamber make this model perfect for
the semiconductor, electronics, solar,
PCB (printed circuit board),
and industrial manufacturing markets as well as
any other company in need of a cost-effective,
high yield plasma processing solution.

Electrode Configuration
Five Stacked Horizontal (20"Wx21"D + 3" Clearance) with Several Optional Configurations Available

Generator
600W 13.56MHz Continuously Variable Power Supply with
Automatic Matching Network

Gas Control
One 0-200cc Mass Flow Controller

Control System
Color PLC-Based Touch Screen Control Interface;
Stores up to 20 Two-Step Recipes

Vacuum Gauge
1-2000 mT

Vacuum Pump
29CFM 2-Stage Direct Drive Oil Pump
(Oxygen Service – Krytox Charged)

3 Micron Oil Filtration System

Chamber Material 6061-T6 Aluminum
Chamber Dimensions 25”x25”x22”
Unit Dimensions 70"x36”x32”
Unit Weight Approx. 1200lbs
Vacuum Pump Weight 150lbs