Plasmatherm Unaxis 790

Ref : 2772381-9-CP

Condition : Used

Manufacturer : Plasmatherm

Model : Unaxis 790

Year(s) : 2001

Quantity : 1

Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)

Wafer Size Range
Minimum 50 mm
Maximum 200 mm
Process DRIE PECVD
Controller Type PC Controller Type
End Point Detection None
Loadlock
Loadlock Yes/No YES
RF Generator Model AE RF 5S
Number of Gas Inputs Eight Gas
CE Marked YES

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