Rudolph AUTO EL

Wafer Size Range
Maximum 150 mm
Illumination Source Type HeNe Laser
Other Information Operating wavelength: 632.8nm
Max sample size: 6" x 6"
Resolution & accuracy:
Polarizer or analyzer: 0.05°
Delta: 0.1°
PSI: 0.05°
Measuring time:
Single film: 15 seconds
Double film: 20 seconds
Power Requirements 115 V 50/60 Hz 1 Phase
Exterior Dimensions
Width 29.000 in (73.7 cm)
Depth 21.000 in (53.3 cm)
Height 17.000 in (43.2 cm)
Weight 130 lb (59 kg)