Rudolph S3000A

Wafer size: 300mm
Install Type: Stand-Alone
Can Produce Wafers As-Is: Yes
CE Mark Certified: Yes
Are any Manuals included: No

Overall Tool Condition
Any Field Modifications: No
All Cables present: Yes
Any Corrosion visible on modules: No
Any Missing / Damaged Parts : No
Shipping Brackets Included : No

Wafer Handler
Handler Type:EFEM, 2 WIDE M122 SYSTEM. P/N:AUA0023A
# of Cassette / FOUP Loaders: 2
Robot Type:Yaskawa. XU-RC400M-D03
End-Effecter Type:VGEE,(Packaged) Vac Grip. W/O:Mapping, 140W, 186L
Pre-Aligner: No
Mini-Environment:Yes
Handler Options: No

System SW (OS) version:Microsoft Windows XP Professional Version 2002 SP2
System SW (App): version:5.2.0.1
Log-In User Name:Mfg
Log-In Password:mfg
Any SW Options:No
SEMI Std Options (E84, E99, etc..):E84, E99

Power Supply: No
AC Dist Box: No
Ext Transformer: No
UPS: No
Heat Exchanger / Chiller: No
Backing Pump(s): No

Facility Requirements
CDA:5.27 ~ 6.33( kg/cm2 )
DIW:None
Vacuum:508+-76 (-)mmHg
Gas: None
Power:200/220VAC 60HZ 50 Amps

Tool Damage/Missing Parts:
Please inspect tool to reconfirm
Dry pumps not included