Semix TR6132U, Spin On Glass(SOG) Coater

Used

Manufacture : Semix
Model : TR6132U
Desc : Spin On Glass(SOG) Coater

Details:
Wafter Size : 4 inch
Sub-Systems : N/A
Status : Operational

Spec :
Dimensions : 1985W x 750D x 1120H (Unit : mm)
Weight : 450 kg
Power : 200 Vac, 1 Phase, 18 A
Dry Air : PS 1/4" female, 4-7 kg /cm2, 250 Nl/m
Cooling Water : 20 A Vp 1kg/cm2 10l/min
DI water : 20 A VP 2 kg/cm2 15l/min
Temperature Control range : 40-70 degrees C
Nozzle : Flat-Type (PVC MVP-9010), Cone-Type EX-424
Rinsing Time : 100 - 300 sec
Constant Temperature Reservoir : 10l max. 40-70 degrees C