Suss MA150cc Mask Aligner

SUSS MA150CC MASK ALIGNER consisting of:
- Model: MA150cc
- Manufacturer: Suss MicroTec / Karl Suss
- Topside and Backside Alignment
- DVM6 microscope
- Objectives: 5X, 10X
- BSA Microscope set WD56
- Lamp house 350W (10-15mW/cm² @ 365nm)
- Optics UV400 for W150
- CIC500
- Computer: MS DOS
- Touchscreen: 10.1" VGA
- Videosystem: DVCU Box
- Substrate transport: W100-150 even
- Pre-Aligner: XPAL, LWL sensor
- Cassette Stations: Standard, reflective
- Mask holder: W150/M7x7/Prox
- Chuck: W150/BSA
- Capable of Hard, Soft, and Vacuum Contact Exposure Modes
- Operations Manual for Suss MA150
- Refurbished to Meet Original Suss MA150 Mask Aligner Specifications

MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed

3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt