Suss MA200

Ref : 2589623-9-CP

Condition : Used

Manufacturer : Suss

Model : MA200

Year(s) : 2010

Quantity : 1

Location : Seller or machines location:
EUROPE (Western and Northern)

Last check : 17 Apr. 2024

- Automatic Mask Aligner
- Top Side Alignment (TSA)
- 4" Vacuum Chuck (inquire for other sizes)
- 5" x 5" Mask Holder (inquire for other sizes)
- Up to 8"/200mm wafer capable
- Cassette to Cassette Operation
- Pre-Aligner: Through and Reflective Sensor
- UV400 High Resolution Optics
- Robot: Genmark GB4
- 1000W Lamp House
- CIC1200 Power Supply
- Wafer Flat Check Camera Option Included
- Ring Field Illumination for TSA Option Included
- Isolation table (included in main body)

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