Suss MicroTec MA8 / BA8 Mask Aligner

PC, Monitor, Keyboard, Mouse
1000W Lamphouse
CIC1200 Power Supply
Isolation Table
Chuck and Maskholder for 8″ / 200mm Wafers
Topside & Backside Alignment

MASK ALIGNER REFURBISHMENT PROCESS consists of:
1) Main System Body:
- Ellipsoidal Mirror Replaced with New
- UV Bulb Replaced with New
- Cold Light Mirror Inspected & Replaced as Needed
- Front Turning Mirror Inspected & Replaced as Needed
- Front Lens Inspected & Replaced as Needed
- Shutter Cylinders Replaced with New
- Mirror House Cylinder Replaced with New
- Lamp Power Supply Tested & Repaired or Replaced as Needed
- Exposure Optics Tested
- Microscope Illumination Bulbs Replaced with New
- Microscope Assembly Inspected and Adjusted as Needed
- Full Optical Alignment of Microscope Performed as Needed
- Machine is Fully Tested to Verify Compliance to Original Specifications
- WEC Head Rebuilt
- Pneumatic Regulators Inspected & Replaced as Needed
- Machine Covers are Repainted or Replaced as Needed

2) Isolation Table:
- Isolation Table Air Bags Inspected & Replaced as Needed
- Pneumatic Regulators Inspected & Replaced as Needed
- Air lines Inspected & Replaced as Needed
- Wheels Inspected & Replaced as Needed
- Leveling Feet Inspected & Replaced as Needed


3) If Applicable:
- Transport Slide Rebuilt
- Pre-Aligner Assembly Rebuilt
- Wafer Alignment Stage Rebuilt
- Cassette Elevator Rebuilt