Suss PA200DS Blueray dual sided prober

Suss PA200DS Blueray dual sided prober for 150 and 200mm wafers
SUSS Microtec Proberbench 6 software CD CORE
version 6.54.2.V.22.11
Year 2007 running on MS Windows 7

AixACT TF analyzer
2000E ferroelectric analyzer
AixACT high voltage amplifier
AixACT DBLi controller module
Suss Proberbench Gen II controller
Dresden Electronik UPS Prober II-LC3 module
Manufacture date 2007

Includes
Spectra Physics 117A-1 laser unit
spare AixACT PDU module
Tool enclosure with TMC active isolation platform
spare Elo touchscreen controller

Dual Beam Laser Interferometer (aixDBLI)
As innovation leader for electrical thin film testing
aixACCT Systems have extended the well accepted
dual beam technique to the first commercially available
Dual Beam Laser Interferometer for up to 8 inch wafer characterization.

The Dual Beam Laser Interferometer (aixDBLI)
for the measurement of d33 offers a proven accuracy
(x-cut quartz) up to 0.2 pm/V.
The main feature of the system is the ultra fast
acquisition time of a few seconds for a single measurement.
Based on a new data acquisition algorithm,
the measurement speed is enhanced by a factor of 100.
This enables for the first time the comparison of electrical
and mechanical data for thin films recorded at the same
excitation frequency. Due to the the differential measurement
principle the influence of sample bending is eliminated,
which is the major obstacle using atomic force microscopes (AFM)
for these types of measurements.

Measurements
Electromechanical large signal strain and polarization measurements.
Piezoelectric small signal coefficient and dielectric constant vs.
dc bias voltage measurements. From these values the
coupling coefficient can be derived by using the
additional aixPlorer software tool if the stiffness value is known.
Fatigue of electric and electromechanical properties.

The unique properties of the aixDBLI system make it suitable
for piezoelectric and electrical reliability testing of MEMS
(micro electro mechanical systems) devices on 6" wafers.
The excellent resolution of this system with an repeatability
accuracy better than 2 % distinguish this system for
mass production qualification.
The whole set-up consists of optical components in a
vibration damped chamber, the TF Analyzer 2000 and
some additional analog circuitry.