Suss PM5 manual prober

6" vacuum chuck
Pair PH500 micropositioners with vacuum base
Optional Kinetic Vibration isolation table add
Optional Infinity 2-3 3.3mp color camera with monitor,
PC, and software Add $2300.
Mitutoyo FS60 stereo zoom with APO 10x/20x objectives
MOTIC fiber optic illuminator
Vacuum manifold

The SUSS PM5 is a manual analytical probe station
designed for precision electrical analysis (DC and HF)
of wafers and substrates up to 150 mm (6 inches)
in diameter. It is widely used for failure analysis,
MEMS testing, and device characterization.

Core Technical Specifications
Wafer/Substrate Size: Up to 150 mm (6") diameter.
Stage Movement (X, Y): 155 x 155 mm range with 5 μm resolution.
Stage Planarity: