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Tegal 903E Plasma Etch System
Ref :
1324038-9-W
Condition :
Used
Manufacturer :
Tegal
Model :
903E Plasma Etch System
Year(s) :
-
Quantity :
1
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
24 Apr. 2020
Brand: Tegal
Model: 903E
Plasma Etch System
Description:
Cassette to cassette single wafer plasma etcher system.
Features:
Control System: Microprocessor
Cassette to Cassette Pick and Place Wafer Handling
Endpoint Detection: Dual channel optical emission with optical filters
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Location :
AMERICA North (USA-Canada-Mexico)
Year(s) :
1985