Tegal Tegal 6520 HRe Alu etch system
Ref : 280463-9-W
Condition : Used
Manufacturer : Tegal
Model : Tegal 6520 HRe Alu etch system
Year(s) : 1995
Quantity : 1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check : 21 Jul. 2011
- 2x high density reflected electron (HRe) process chambers with cold cathode gauges
- 2x dual channel temperature controller
- 1x vacuum cassette elevator / 1x atmospheric cassette elevator
- 1x strip / 1x wet rinse process module
- 1x turbo pumped / 1x atmospheric robotic wafer transport
- Human interface console
- RF power supply module
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