Tegal Tegal 903e etcher system
Ref :
280464-9-W
Condition :
Used
Manufacturer :
Tegal
Model :
Tegal 903e etcher system
Year(s) :
1995
Quantity :
1
Location :
Seller or machines location:
EUROPE (Western and Northern)
EUROPE (Western and Northern)
Last check :
21 Jul. 2011
- Plasma etch chamber
- cassette to cassette, single wafer, silicon dioxide etch system with diode chamber
- 2x temperature controllers
- 6" wafer capability
- Power supply 1000W 13.56Mhz
- SEMI SECS I+II
- RS232C serial port
- 4MFCs (N2, CHF3, SF6, He calibrated)
- including backing pumps and transformer
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