Tegal
Ref :
1845263-9-GO
Condition :
Used
Manufacturer :
Tegal
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
12 Jul. 2018
Tegal 515 Plasma Etchers (Tegal 515 Plasma stripper)
*Barrel Type Plasma Asher Batch loaded
*Barrel type plasma reactor designed specifically for use as a fast stripper of photoresist for the fabrication of semiconductor wafers
*Achieves its strip rates by providing a large rate of gas conduction up to 300W of RF Energy
*Reaction Chamber: Aluminum 12¿ (30.48 cm) deep
*Manual or automatic modes