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Tegal

Ref : 1845302-9-GO
Condition : Used
Manufacturer : Tegal
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 12 Jul. 2018

Tegal 803 Etchers

*Inline Automatic Plasma Etcher
*Fully automatic
*Microprocessor-based plasma chemistry etcher
*Designed especially for the etching of silicon dioxide (Si02) thin film deposited on single crystal or polysilicon semiconductor wafers
*Provides up to four process gases, two process channels and a clean channel

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