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Tegal
Ref :
1845309-9-GO
Condition :
Used
Manufacturer :
Tegal
Model :
-
Year(s) :
-
Quantity :
0
Location :
Seller or machines location:
AMERICA North (USA-Canada-Mexico)
AMERICA North (USA-Canada-Mexico)
Last check :
12 Jul. 2018
Tegal 901E Rie
*Cassette to Cassette Poly/Nitride Plasma Etcher
*13.56 MHz RF Generator
*Easy to use menu driven control
*Input gases controlled by MFC, up to 4 MFC with system
*Non-friction spatula wafer transport