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Tegal

Ref : 1848288-9-GO
Condition : Used
Manufacturer : Tegal
Model : -
Year(s) : -
Quantity : 0
Location : Seller or machines location:
AMERICA North (USA-Canada-Mexico)
Last check : 18 Jul. 2018

Tegal 965 Barrel Etcher

*Batch photoresist stripper/poly/nitride etcher
*13.56 ENI-ACG-10B 1000 watt generator or Tegal 600 watt systems available
*VT-520 Monitor
*Two process gases
*Holds up to 3ea. 6" boats of wafers

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