TEL Act 12

Main Controller Type: NA
Wafer Flow: Right to Left

Configuration
2) Missing Parts List: No CSE
A. 3-1 DEV Unit
- Spin Chuck
- Wind Velocity Sensor

B. 3-2 DEV Unit
- Spin Chuck
- ARM#2(Rinse) Motor Driver
- Temp Sensor Fail
- Spin Unit Solenoid Valve Ass’y
- Develop Drain Fitting

C. Coater 1 Unit
- Spin Chuck
- Catch-Cup Ass’y
- ARM#1 Motor Driver
- Nozzle Changer Motor Driver
- EBR(Side Rinse Arm) Motor Cable Ass’y
- EBR(Side Rinse Arm) Home Sensor
- Spin Unit Solenoid Valve Ass’y
- Spin Chuck Vacuum Solenoid Valve Ass’y

D. Coater 2 Unit
- Spin Chuck
- Catch-Cup Ass’y
- ARM#1 Home Sensor

3) Etc.
1. Main Body Rear Cover
2. Coater Unit Exhaust SUS Pipe
3. Coater Unit Auto Damper Ass’y
4. Rear Under Exhaust SUS Pipe